Fabrication of a Si micro-turbine using Proton Beam Writing and Porous Silicon Micromachining

The scanning proton beam induces damage along the proton track as it penetrates the silicon. The silicon is then subjected to electro-chemical etching in hydrofluoric acid to produce porous silicon. The local production of porous silicon is retarded where the silicon is damaged, and the removal of the porous silicon using KOH reveals silicon structures similar to the proton pattern.

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I. Rajta, Sz. Szilasi, P. Fürjes, Z. Fekete and Cs. Dücső (To be published)

Copyright - Institute of Nuclear Research of the HAS. P.O Box 51, H-4001 Debrecen, Hungary Research Institute for technical Physics and Materials Science - HAS, P.O Box 49, H-1525 Budapest, Hungary

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